Evaluation of a Microlens Array using Optical Interferometry
نویسنده
چکیده
In this paper, a technique based on the use of optical interferometry is employed to evaluate the surface geometry and refractive index profile of a graded-index planar microlens array. The experimental setup consists of sodium light and He-Ne laser sources which are incorporated into a microscopy system. The two light sources can be utilized alternately for surface geometry and refractive index measurement. The Newton’s rings resulting from the sodium and laser illumination sources are analyzed by proposed algorithms combined with fringe tracking techniques. Experimental results demonstrate that the surface profile and gradedindex properties of the micro-lenses can be readily obtained.
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